Mask Cleaning & Replacement Services

Our pellicle replacement mask/clean programs are designed to restore used pellicles to top operational form. Our process includes:

  • Old/damage pellicle removal
  • Mask surface cleaning to remove contamination/haze
  • Re-inspection to verify the pattern is undamaged and mask cleanliness.
  • Repair of any damage
  • Re-attachment of pellicle
  • Recertification of phase and transmission values for phase-shift masks.